REPUBLIC OF SERBIA

MINISTRY OF DEFENCE

www.mod.gov.rs

MINISTRY OF DEFENCE

Material Resources Sector

Defensive Technologies Department

Military Technical Institute

www.vti.mod.gov.rs

MEMS/NEMS sensors of chemical and biological agents: Applicability of different models for steady-state analysis of sensor time response and noise

Ivana Jokić

Institute of Chemistry, Technology and Metallurgy - CMT, University of Belgrade, Belgrade, Serbia, ijokic@nanosys.ihtm.bg.ac.rs

katarina radulović

Institute of Chemistry, Technology and Metallurgy - CMT, University of Belgrade, Belgrade, Serbia, kacar@nanosys.ihtm.bg.ac.rs

miloš frantlović

Institute of Chemistry, Technology and Metallurgy – CMT, University of Belgrade, Belgrade, Serbia, frant@nanosys.ihtm.bg.ac.rs

zoran djurić

Institute of Technical Sciences of SASA, Serbian Academy of Sciences and Arts, Belgrade, Serbia, zoran.djuric@itn.sanu.ac.rs

predrag m. krstajić

Institute of Chemistry, Technology and Metallurgy - CMT, University of Belgrade, Belgrade, Serbia, pkrstajic@nanosys.ihtm.bg.ac.rs

Abstract: We analyze the time response of MEMS/NEMS sensors of chemical and biological agents and its noise, by using two mathematical models. One of them is commonly used in the literature on MEMS/NEMS adsorption-based chemical and biological sensors, while the other one, which is more elaborate, and takes into account additional relevant physical processes, has been developed by us. We also investigate the limits of applicability of the two models as a function of the target substance concentration, especially having in mind the decrease of the minimal detectable concentration in the new sensor generation.

Keywords: chemical sensor, biosensor, time response, adsorption-desorption noise, steady-state analysis.