REPUBLIC OF SERBIA

MINISTRY OF DEFENCE

www.mod.gov.rs

MINISTRY OF DEFENCE

Material Resources Sector

Defensive Technologies Department

Military Technical Institute

www.vti.mod.gov.rs

eNERGY DISPERSIVE SPECTROMETRY microanalysis of steel

ljubica totovski

Military Technical Institute, Belgrade, totovski@sezampro.rs

Abstract: Energy dispersive spectrometry (EDS) is the dominant spectrometric technique for X-ray microanalysis in the scanning electron microscopy (SEM). Several samples of different types of steels with known composition were analysed and the accuracy of quantitative EDS analysis have been studied. Monte Carlo simulations of φ(ρz) curves were applied to compare the ratio of generated and emited X-rays for different elements. Optimum conditions of analysis were established and the accuracy of analysis were reported.

Key words: Energy Dispersive Spectrometry (EDS), Scanning Electron Microscopy (SEM), quantitative analysis.