REPUBLIC OF SERBIA

MINISTRY OF DEFENCE

www.mod.gov.rs

MINISTRY OF DEFENCE

Material Resources Sector

Defensive Technologies Department

Military Technical Institute

www.vti.mod.gov.rs

Microwave Microstrip Wide Band-stop Filter on High-resistivity Silicon (HRS) Substrate

DuŠan NešiĆ

IHTM-CMTM, University of Belgrade, nesicad@nanosys.ihtm.bg.ac.rs

ivana jokiĆ

IHTM-CMTM, University of Belgrade

MiloŠ FrantloviĆ

IHTM-CMTM, University of Belgrade

Abstract: Low-resistivity silicon (standard CMOS-grade silicon, resistivity 1 - 30 Ω-cm) is a troublesome issue for the microwave passive components. One solution is using high-resistivity silicon (HRS) with resistivity 2 kΩ-cm or higher. The idea of this paper is to simulate circuit with ideal waveguides and to apply it to the microstrip structure on HRS substrate. Wide band-stop filter on high-resistivity silicon (HRS), resistivity 5 kΩ-cm, is introduced. The starting point is an ideal circuit model with ideal waveguides. The filter is simulated and fabricated in microstrip technology and compared with the ideal model. The structure is adjusted to the conditions of silicon and technological boundaries.

Key words: microwave, high-resistivity silicon (HRS), filter.