analysis of response and adsorption-desorption FLUCTUATIONS spectrum of mems/nems chemical and biological sensors

ivana jokić

IHTM – Institute of Microelectronic Technologies and Single Crystals, University of Belgrade, 11000 Belgrade, Serbia, ijokic@nanosys.ihtm.bg.ac.rs

zoran djurić

IHTM – Institute of Microelectronic Technologies and Single Crystals, University of Belgrade, 11000 Belgrade, Serbia, zdjuric@nanosys.ihtm.bg.ac.rs

katarina radulović

IHTM – Institute of Microelectronic Technologies and Single Crystals, University of Belgrade, 11000 Belgrade, Serbia, kacar@nanosys.ihtm.bg.ac.rs

miloš frantlović

IHTM – Institute of Microelectronic Technologies and Single Crystals, University of Belgrade, 11000 Belgrade, Serbia, frant@nanosys.ihtm.bg.ac.rs

predrag krstajić

IHTM – Institute of Microelectronic Technologies and Single Crystals, University of Belgrade, 11000 Belgrade, Serbia, pkrstajic@nanosys.ihtm.bg.ac.rs

Abstract: There is a great interest for chemical and biological sensors intended for environmental monitoring and defense. Micro/nanoelectromechanical (MEMS/NEMS) sensors, whose principle of operation is based on adsorption-desorption process, are highly sensitive, selective, small and portable. In this paper the theoretical analysis is presented of both the response and the spectrum of adsorption-desorption noise of such sensors intended for detection of substances present in gas or in liquid phase.